Advanced germanium devices: The development of materials and processing

RMIT Australia

Advanced germanium devices: The development of materials and processing

Leong, M, Johnson, B, Kandasamy, S, Holland, A, Gamble, H, Armstrong, M, Perova, T, McNeil, D, Rubanov, S and McCallum, J 2010, 'Advanced germanium devices: The development of materials and processing', in A/Prof. Hark Hoe Tan (ed.) 2010 Conference on Optoelectronic and Microeletronic Materials and Devices: COMMAD 2010 Proceedings, Canberra, Australia, 12-15 December, 2010, pp. 171-172.

Document type:	Conference Paper
Collection:	Conference Papers

Title	Advanced germanium devices: The development of materials and processing
Author(s)	Leong, M Johnson, B Kandasamy, S Holland, A Gamble, H Armstrong, M Perova, T McNeil, D Rubanov, S McCallum, J
Year	2010
Conference name	2010 Conference on Optoelectronic and Microeletronic Materials and Devices (COMMAD 2010)
Conference location	Canberra, Australia
Conference dates	12-15 December, 2010
Proceedings title	2010 Conference on Optoelectronic and Microeletronic Materials and Devices: COMMAD 2010 Proceedings
Editor(s)	A/Prof. Hark Hoe Tan
Publisher	IEEE
Place of publication	New Jersey, USA
Start page	171
End page	172
Total pages	2
Abstract	The development and optimisation of materials and processes used for germanium metal-oxide-semiconductor devices are investigated. The gate oxide and the source-drain are examined using electrical and optical techniques.
Subjects	Electrical and Electronic Engineering not elsewhere classified
DOI - identifier	10.1109/COMMAD.2010.5699722
Copyright notice	© 2010 IEEE
ISBN	9781424473328

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Advanced germanium devices: The development of materials and processing