Wafer scale texturing of LiNbO3

Sivan, V, Holland, A, Bui, L, Priest, T and Mitchell, A 2007, 'Wafer scale texturing of LiNbO3', in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2007), Baltimore, MD, 6-11 May 2007.


Document type: Conference Paper
Collection: Conference Papers

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Title Wafer scale texturing of LiNbO3
Author(s) Sivan, V
Holland, A
Bui, L
Priest, T
Mitchell, A
Year 2007
Conference name Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2007)
Conference location Baltimore, MD
Conference dates 6-11 May 2007
Proceedings title Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2007)
Publisher IEEE
Place of publication USA
Abstract We report a novel technique for micro texturing of LiNbO3. Well-defined raised ridges and etched trenches are demonstrated. This technique is suitable for the realization of surface relief gratings and photonic crystals.
Subjects Lasers and Quantum Electronics
Keyword(s) integrated optics
DOI - identifier 10.1109/CLEO.2007.4452887
Copyright notice © 2007 Optical Society of America
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