Data-driven condition-based maintenance of test handlers in semiconductor manufacturing

Guan, T, Kuang, Y, Ooi, M, Cheah, X, Tan, Y and Demidenko, S 2011, 'Data-driven condition-based maintenance of test handlers in semiconductor manufacturing', in Gourab Sen Gupta, Donald Bailey, Serge Demidenko, Adam Osseiran, Michel Renovell (ed.) Proceedings of the 2011 Sixth IEEE International Symposium on Electronic Design, Test and Applications, Queenstown, New Zealand, 17-19 January, 2011, pp. 189-194.


Document type: Conference Paper
Collection: Conference Papers

Title Data-driven condition-based maintenance of test handlers in semiconductor manufacturing
Author(s) Guan, T
Kuang, Y
Ooi, M
Cheah, X
Tan, Y
Demidenko, S
Year 2011
Conference name 2011 Sixth IEEE International Symposium on Electronic Design, Test and Applications
Conference location Queenstown, New Zealand
Conference dates 17-19 January, 2011
Proceedings title Proceedings of the 2011 Sixth IEEE International Symposium on Electronic Design, Test and Applications
Editor(s) Gourab Sen Gupta, Donald Bailey, Serge Demidenko, Adam Osseiran, Michel Renovell
Publisher IEEE
Place of publication New York, United States
Start page 189
End page 194
Total pages 6
Abstract To stay competitive, semiconductor manufacturers have come to acknowledge maintenance as an essential strategic element in manufacturing process planning. Condition-based maintenance (CBM) allows the maintenance strategy to be customised based on the equipment type and its failure pattern. Traditional CBM uses simple control charts, thus limiting its application to simple systems. This paper proposes the use of Data-driven CBM as a maintenance strategy for equipment in a semiconductor mass production environment.
Subjects Industrial Electronics
Keyword(s) semiconductor manufacturing
condition based maintenance
test handler
control chart
DOI - identifier 10.1109/DELTA.2011.42
Copyright notice © 2011 IEEE
ISBN 9780769543062
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