Gas-sensing characterization of TiO2-ZnO based thin film

Wisistsora-at, A, Tuantranont, A, Comini, E, Sberveglieri, G and Wlodarski, W 2006, 'Gas-sensing characterization of TiO2-ZnO based thin film', in S. Lee (ed.) 5th IEEE Conference on Sensors, 2006, Daegu, Korea, 22-25 October 2006, pp. 964-967.

Document type: Conference Paper
Collection: Conference Papers

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Title Gas-sensing characterization of TiO2-ZnO based thin film
Author(s) Wisistsora-at, A
Tuantranont, A
Comini, E
Sberveglieri, G
Wlodarski, W
Year 2006
Conference name 5th IEEE Conference on Sensors, 2006
Conference location Daegu, Korea
Conference dates 22-25 October 2006
Proceedings title 5th IEEE Conference on Sensors, 2006
Editor(s) S. Lee
Publisher IEEE
Place of publication Piscataway, USA
Start page 964
End page 967
Total pages 4
Abstract In this work, we investigate gas sensing characteristics of a new composite material, ZnO doped TiO2. TiO2/ZnO layers have been deposited by ion-assisted e-beam evaporation with different doping concentrations. Structural and morphological characterization has been carried out by means of SEM, XRD and EDX in order to correlate structural properties with gas sensing behavior. Gas-sensing characterizations toward acetone, ammonia, ethanol, CO, and NO2 highlight interesting behavior for the layers tested. Low ZnO concentration (1%) increase responses toward acetone and ethanol while response toward CO, NO2, and ammonia are still low. However, high ZnO concentration (5-10%) decreases acetone and ethanol responses while CO, NO, and ammonia is almost diminished. In addition, ZnO:TiO2 exhibit good response at medium operating temperature of 300degC.
Subjects Nanomaterials
Keyword(s) characterization
gas sensor
thin film
DOI - identifier 10.1109/ICSENS.2007.355784
Copyright notice © 2006 IEEE
ISBN 1-4244-0376-6
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