Femtosecond laser processing amorphous silicon thin film for photonics applications

Luan, H 2018, Femtosecond laser processing amorphous silicon thin film for photonics applications, Doctor of Philosophy (PhD), Science, RMIT University.


Document type: Thesis
Collection: Theses

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Title Femtosecond laser processing amorphous silicon thin film for photonics applications
Author(s) Luan, H
Year 2018
Abstract Devices made from semiconductor materials are popular due to their compact spatial arrangement, trustworthiness, and cheap cost. Amorphous silicon (a-Si) is one of tetrahedral amorphous semiconductor materials with direct bandgaps and is widely acknowledged as a premier low-cost material for many different photonics applications. Femtosecond laser is a ultrafast laser that emits an optical pulse with duration below one picosecond. The dramatic characteristics consisting of the ultrashort pulsewidth and the ultrahigh peak intensity make femtosecond laser technology a promising approach to manufacturable material processing with speedy development.

Currently, the photonics applications based on a-Si thin films are becoming increasingly attractive. However, the fabrication process in industry is still working with the nanosecond laser. The interaction process between the ultrashort laser pulse and the a-Si has not been well studied and demonstrated. It is important to have an essential understanding of the femtosecond laser-material interaction for development of the laser fabrication process and the investigation of the photonics applications.
This work focuses on the investigation of the femtosecond laser/a-Si interaction. The theoretical study of the interaction is demonstrated first. Then, in the laser scribing process of a-Si thin films, narrow and clean grooves are achieved experimentally by employing the femtosecond laser. Finally, the binary holographic images are captured by illuminating the hologram patterns on the a-Si thin films fabricated by direct femtosecond laser writing.

In future, it is crucial to employ the scribing process for the fabrication of high- performance a-Si thin film solar cells. The realisation of a four-level hologram is also of great interest. It is believed that there will be more innovative photonics devices based on a femtosecond laser processing of a-Si thin films.
Degree Doctor of Philosophy (PhD)
Institution RMIT University
School, Department or Centre Science
Subjects Photonics, Optoelectronics and Optical Communications
Keyword(s) Femtosecond laser
Amorphous silicon
Laser scribing
Holographic imaging
Thin film solar cells
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Created: Tue, 14 May 2019, 14:50:58 EST by Adam Rivett
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