Artificial Neural Network Modelling on TiN Coating Parameters in Sputtering Process

Khorasani, A, Kootsookos, A and Saadatkia, P 2011, 'Artificial Neural Network Modelling on TiN Coating Parameters in Sputtering Process', in M. Kamarei (ed.) Proceedings of the ICME2011, 3rd International and 12th National Conference on Manufacturing Engineering, Tehran, Iran, 27-29 December 2011, pp. 1-6.


Document type: Conference Paper
Collection: Conference Papers

Title Artificial Neural Network Modelling on TiN Coating Parameters in Sputtering Process
Author(s) Khorasani, A
Kootsookos, A
Saadatkia, P
Year 2011
Conference name ICME2011, 3rd International and 12th National Conference on Manufacturing Engineering
Conference location Tehran, Iran
Conference dates 27-29 December 2011
Proceedings title Proceedings of the ICME2011, 3rd International and 12th National Conference on Manufacturing Engineering
Editor(s) M. Kamarei
Publisher ICME
Place of publication Tehran, Iran
Start page 1
End page 6
Total pages 6
Abstract Sputtering is a Physical Vapor Deposition (PVD) vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Due to this coating process the material performance will be improved. The objective of this study is to evaluate the hardness of titanium nitride thin film layers by utilizing multi layer perceptron (MLP) artificial neural networks (ANN). For determining the influences of the various sputtering parameters (voltage, work pressure, ion bombard time and Sub-layer temperature) on the hardness of TiN thin films, the Taguchi approach has been used. 50 experiments were performed, varying the PVD parameters and the resulting hardness of the film was measured. From these experiments 42 were used for the training process and 8 have been utilized for validation process. A very good agreement between the ANN predictions and the experimental results was achieved, with a 99.754% correlation between the trained ANN result and the experimental measurements.
Subjects Neural, Evolutionary and Fuzzy Computation
Keyword(s) Sputtering
PVD
Coasting parameters
DOE
Artificial neural networks
Copyright notice © 2011 ICME
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