Arbitrary axis rotating surface acoustic wave micro motor

Tjeung, R, Hughes, M, Yeo, L and Friend, J 2011, 'Arbitrary axis rotating surface acoustic wave micro motor', in Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Kaohsiung, Taiwan, 20-23 February 2011, pp. 184-187.


Document type: Conference Paper
Collection: Conference Papers

Title Arbitrary axis rotating surface acoustic wave micro motor
Author(s) Tjeung, R
Hughes, M
Yeo, L
Friend, J
Year 2011
Conference name International Conference on Nano/Micro Engineered and Molecular Systems
Conference location Kaohsiung, Taiwan
Conference dates 20-23 February 2011
Proceedings title Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher Curran Associates, Inc
Place of publication New York
Start page 184
End page 187
Total pages 4
Abstract Abstract- We present a surface acoustic wave (SAW) actuated rotating micro motor. The rotors are 1 millimeter metal spheres which are placed on the surface of a Lead Zirconate Titanate (PZT) substrate with IDTs designed to generate SAW with ~ 700 μm wavelength. A Laser Doppler Vibrometer (LDV) was used to visualize the travelling SAW and the result was compared with the rotation of the rotor. The motor transient responses are presented, along with its torque-speed curve. The maximum rotational speed and torque reported were ~1000 rpm and ~14 μN.mm, respectively. Arbitrary motions have also been demonstrated utilizing a magnetic pre-load and multiple IDTs activation
Subjects Microelectromechanical Systems (MEMS)
Keyword(s) rotational micro motor
surface acoustic wave
ultrasonics motor
piezoelectric
Copyright notice © 2011 IEEE
ISBN 9781612847757
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