Accurate evaluation of specific contact resistivity of multi-layered silicon-based ohmic contacts

Bhaskaran, M, Sriram, S and Holland, A 2011, 'Accurate evaluation of specific contact resistivity of multi-layered silicon-based ohmic contacts' in David E. Malach (ed.) Advances in Mechanical Engineering Research, Nova Science, New York, USA, pp. 163-184.


Document type: Book Chapter
Collection: Book Chapters

Title Accurate evaluation of specific contact resistivity of multi-layered silicon-based ohmic contacts
Author(s) Bhaskaran, M
Sriram, S
Holland, A
Year 2011
Title of book Advances in Mechanical Engineering Research
Publisher Nova Science
Place of publication New York, USA
Editor(s) David E. Malach
Start page 163
End page 184
Subjects Functional Materials
Microelectronics and Integrated Circuits
Condensed Matter Physics not elsewhere classified
Summary Advancements in nanotechnology have created the need for efficient means of communication of electrical signals to nanostructu res, which can be addressed using low resistance contacts. In order to study and estimate the resistance of such contacts or the resistance posed by the interface(s) in such contacts, standardised test structures and accurate evaluation techniques need to be used. The resistance posed by an interface is quantified using its specific contact resistivity (SCR), and while multiple techniques have been utilised, inaccuracies of such techniques in measuring values of SCR lesser than 10'8 ncm2 have been reported. This chapter presents the experimental validation for a new technique for accurate evaluation of low values of SCR, with the ohmic contacts using relevant silicide th in fi lms (titanium silicide TiSi2 and nickel silicide NiSi). Experimental data for alumi nium (AI) to TiSi2 ohmic contacts and AI/NiSi/doped silicon ohmic contacts are presented.
Copyright notice © 2011 Nova Science Publishers Inc
Keyword(s) thin films
elemental ohmic contacts
specific contact resistivity
titanium silicide
nickel silicide
ion implantation
nanoelectronics
semiconductor doping
functional materials and microsystems
ISBN 9781617611100
Versions
Version Filter Type
Access Statistics: 210 Abstract Views  -  Detailed Statistics
Created: Wed, 17 Jul 2013, 14:37:00 EST by Catalyst Administrator
© 2014 RMIT Research Repository • Powered by Fez SoftwareContact us