Selective NO2 gas sensing characteristics of sol-gel prepared MoO3-Wo3 thin films

Galatsis, K, Li, Y, Wlodarski, W and Kalantar-Zadeh, K 2000, 'Selective NO2 gas sensing characteristics of sol-gel prepared MoO3-Wo3 thin films', in Proceedings of Conference on Optoelectronic and Microelectronic Materials and Devices, Melbourne, Victoria, 6-8 December 2000.


Document type: Conference Paper
Collection: Conference Papers

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Title Selective NO2 gas sensing characteristics of sol-gel prepared MoO3-Wo3 thin films
Author(s) Galatsis, K
Li, Y
Wlodarski, W
Kalantar-Zadeh, K
Year 2000
Conference name Conference on Optoelectronic and Microelectronic Materials and Devices
Conference location Melbourne, Victoria
Conference dates 6-8 December 2000
Proceedings title Proceedings of Conference on Optoelectronic and Microelectronic Materials and Devices
Publisher IEEE
Place of publication New York, USA
Abstract Molybdenum trioxide - tungsten trioxide -(MoO3WO3) binary metal oxide thin films have been prepared by the sol-gel process. The films were deposited using the spin coating technique onto alumina substrates with interdigital electrodes and single crystal silicon substrates for electrical and micro characterization. Scanning Electron Microscopy (SEM) showed -MoO3WO3 film morphology composed of MoO3 needle like grains and WO3 spherical grains when annealed at 450°C. The films exhibited selective gas sensing characteristics at an operating temperature of 300°C towards nitrogen dioxide (NO2).
Subjects Colloid and Surface Chemistry
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