A layered structure surface acoustic wave for oxygen sensing

Kalantar-Zadeh, K, Li, X, Wlodarski, W and Brennan, F 2000, 'A layered structure surface acoustic wave for oxygen sensing', in Conference on Optoelectronic and Microelectronic Materials and Devices, Melbourne, Victoria, 6-8 December 2000.


Document type: Conference Paper
Collection: Conference Papers

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Title A layered structure surface acoustic wave for oxygen sensing
Author(s) Kalantar-Zadeh, K
Li, X
Wlodarski, W
Brennan, F
Year 2000
Conference name Conference on Optoelectronic and Microelectronic Materials and Devices
Conference location Melbourne, Victoria
Conference dates 6-8 December 2000
Proceedings title Conference on Optoelectronic and Microelectronic Materials and Devices
Publisher IEEE
Place of publication New York
Abstract A novel layered structure surface acoustic wave (layered SAW) transducer has been employed for an oxygen sensing application. It is a SiO2(0.36 µm)/ST-cut quartz crystal transducer. The dominant mode propagating in the transducer is a combination of Rayleigh and Love modes. Such a structure has the advantage of confining the acoustic wave energy to the top selective layer, which increases the sensitivity of the device. A TiO2 thin film deposited by the sol-gel process has been used as the oxygen sensitive layer.
Subjects Colloid and Surface Chemistry
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