Conductometric sensor based on nanostructured titanium oxide thin film deposited on polyimide substrate with dissimilar metallic electrodes

Conductometric sensor based on nanostructured titanium oxide thin film deposited on polyimide substrate with dissimilar metallic electrodes

Zhang, C, Sadek, A, Breedon, M, Ippolito, S, Wlodarski, W, Truman, T and Kalantar-Zadeh, K 2008, 'Conductometric sensor based on nanostructured titanium oxide thin film deposited on polyimide substrate with dissimilar metallic electrodes', in Proceedings of the 2008 International Conference on Nanoscience and Nanotechnology (ICONN2008), Melbourne, Victoria, 25-29 February 2008.

Document type:	Conference Paper
Collection:	Conference Papers

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Title	Conductometric sensor based on nanostructured titanium oxide thin film deposited on polyimide substrate with dissimilar metallic electrodes
Author(s)	Zhang, C Sadek, A Breedon, M Ippolito, S Wlodarski, W Truman, T Kalantar-Zadeh, K
Year	2008
Conference name	2008 International Conference on Nanoscience and Nanotechnology (ICONN2008)
Conference location	Melbourne, Victoria
Conference dates	25-29 February 2008
Proceedings title	Proceedings of the 2008 International Conference on Nanoscience and Nanotechnology (ICONN2008)
Publisher	IEEE
Place of publication	Australia
Abstract	A conductometric sensor was fabricated on flexible polyimide substrate with using interdigital transducer (IDT) formed by periodic Au and Cr tracks and coated with a TiO2 nanostructured sensitive layer. Thin films of TiO2 were deposited using the radio frequency (RF) magnetron sputtering method. Atomic force microscope (AFM) and scanning electron microscope (SEM) techniques were employed for the characterization of thin films. The sensor was tested towards humidity changes at room temperature.
Subjects	Nanoelectronics
Keyword(s)	TiO2 moisture sensing flexible substrate polyimide
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