Love mode SAW sensors with ZnO layer operating in gas and liquid media

Kalantar-Zadeh, K, Wlodarski, W, Trinchi, A, Holland, A and Galatsis, K 2002, 'Love mode SAW sensors with ZnO layer operating in gas and liquid media', in Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition, New Orleans, Louisiana, USA, 29-31 May 2002.


Document type: Conference Paper
Collection: Conference Papers

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Title Love mode SAW sensors with ZnO layer operating in gas and liquid media
Author(s) Kalantar-Zadeh, K
Wlodarski, W
Trinchi, A
Holland, A
Galatsis, K
Year 2002
Conference name 2002 IEEE International Frequency Control Symposium and PDA Exhibition
Conference location New Orleans, Louisiana, USA
Conference dates 29-31 May 2002
Proceedings title Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition
Publisher IEEE
Place of publication New Orleans, Louisiana, USA
Abstract Novel layered surface acoustic wave (SAW) sensors, based on a ZnO/90° rotated ST-cut quartz crystal structure, were fabricated. They were employed for liquid and gas sensing applications. Their mass detection limit in liquid media is as low as 100 pg/cm2. Furthermore, these sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas.
Subjects Solid State Chemistry
Keyword(s) sensor
gas
immunosensor
SAW
layer
ZnO
DOI - identifier 10.1109/FREQ.2002.1075887
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