A ZnO/SiO2/Si(100) Love mode transducer

Kalantar-Zadeh, K, Wlodarski, W, Holland, A and Reeves, K 2002, 'A ZnO/SiO2/Si(100) Love mode transducer', in Conference on Optoelectronic and Materials Microelectronics and Devices, Melbourne, Australia, 6-8 December 2000, pp. 367-370.

Document type: Conference Paper
Collection: Conference Papers

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Title A ZnO/SiO2/Si(100) Love mode transducer
Author(s) Kalantar-Zadeh, K
Wlodarski, W
Holland, A
Reeves, K
Year 2002
Conference name Conference on Optoelectronic and Materials Microelectronics and Devices
Conference location Melbourne, Australia
Conference dates 6-8 December 2000
Proceedings title Conference on Optoelectronic and Materials Microelectronics and Devices
Publisher IEEE
Place of publication New York, USA
Start page 367
End page 370
Total pages 4
Abstract ZnO/SiO2/Si[100] Love mode transducers were fabricated. SiO2 films were deposited using electron beam evaporation. ZnO films were deposited using r.f. magnetron sputtering. ZnO and SiO2 films were examined by SEM and the performance of the transducers was examined by their acoustic response. The observation of the SAW Love mode delay line was performed under untuned conditions. Operating frequencies of the transducers were around 85 MHz.
Subjects Colloid and Surface Chemistry
Copyright notice © 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
ISBN 0-7803-6698-0
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