Ultraviolet detection from energetically deposited titania films

Field, M, Murdoch, B, McCulloch, D and Partridge, J 2014, 'Ultraviolet detection from energetically deposited titania films', Applied Physics Letters, vol. 104, no. 13, 131905, pp. 1-4.


Document type: Journal Article
Collection: Journal Articles

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Title Ultraviolet detection from energetically deposited titania films
Author(s) Field, M
Murdoch, B
McCulloch, D
Partridge, J
Year 2014
Journal name Applied Physics Letters
Volume number 104
Issue number 13
Article Number 131905
Start page 1
End page 4
Total pages 4
Publisher American Institute of Physics
Abstract Thin films of unintentionally doped n-type titania have been energetically deposited from a filtered cathodic vacuum arc. All films were dense, smooth, and transparent with crystallinity depending on the deposition/annealing temperature. At a growth temperature of 600 C, the preferred phase could be changed from rutile to anatase by increasing the oxygen process pressure thereby reducing dynamic annealing. Pt/TiOx/Pt ultraviolet detectors exhibiting rectifying current-voltage characteristics and ultraviolet-visible rejection ratios exceeding 104 :1 were formed on selected films.
Keyword(s) TIO2 THIN-FILMS
CATHODIC-VACUUM-ARC
OPTICAL-PROPERTIES
TEMPERATURE
TRANSITION
DIOXIDE
DOI - identifier 10.1063/1.4870069
Copyright notice © 2014 AIP Publishing LLC.
ISSN 0003-6951
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