Wet etching techniques for the realisation of novel electrode structures on X and Z-cut lithium niobate

Chong, H, Mitchell, A and Austin, M 2002, 'Wet etching techniques for the realisation of novel electrode structures on X and Z-cut lithium niobate', in Proceedings Conference on Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000., Australia, 6-8 December 2002.


Document type: Conference Paper
Collection: Conference Papers

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Title Wet etching techniques for the realisation of novel electrode structures on X and Z-cut lithium niobate
Author(s) Chong, H
Mitchell, A
Austin, M
Year 2002
Conference name Conference on Optoelectronic and Microelectronic Materials and Devices
Conference location Australia
Conference dates 6-8 December 2002
Proceedings title Proceedings Conference on Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000.
Publisher IEEE
Place of publication USA
Abstract Lithium niobate (LiNbO3) is a popular material for the implementation of many photonic devices, but most often for broadband electro-optic (EO) modulators. Effective modulators may be realised through careful design of the RF electrodes. The most successful electrode designs incorporate some form of surface machining and thus in order to explore novel practical electrode structures, it has been necessary to develop means of etching the LiNbO3 surface precisely. In this paper, we present the etching of LiNbO3 using a proton exchange (PE) wet etching method including a detailed comparison of the etch properties of X and Z-cut LiNbO3.
Subjects Colloid and Surface Chemistry
Keyword(s) integrated optics
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