Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques

Mitchell, A, Holland, A, Vora, K and Ghantasala, M 2004, 'Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques', in Proceedings of the IEEE Biophotonics Summer Topical Conference 2004, San Diego, USA, 28-30 June 2004.


Document type: Conference Paper
Collection: Conference Papers

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Title Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques
Author(s) Mitchell, A
Holland, A
Vora, K
Ghantasala, M
Year 2004
Conference name Biophotonics Summer Topical Conference
Conference location San Diego, USA
Conference dates 28-30 June 2004
Proceedings title Proceedings of the IEEE Biophotonics Summer Topical Conference 2004
Publisher IEEE
Place of publication New Jersey, USA
Abstract Recent progress on the realization of a silicon integrated biophotonic chip using plasma etching and laser ablation is presented. The chip utilizes films of SU-8 and UV-15 polymer material. An intersecting optical waveguide and microfluidic channel exhibiting good optical transmission across the channel is demonstrated.
Subjects Interdisciplinary Engineering not elsewhere classified
Keyword(s) integrated optics
lab-on-a-chip
DOI - identifier 10.1109/LEOSST.2004.1338655
Copyright notice © 2004 IEEE
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