Effects of design geometry on SU8 polymer waveguides

Effects of design geometry on SU8 polymer waveguides

Holland, A, Balkunje, V, Mitchell, A, Austin, M, Raghunathan, M and Kostovski, G 2005, 'Effects of design geometry on SU8 polymer waveguides', in Proceedings of SPIE, Vol. 5649, 186 (2005), Sydney, Australia, 13 December 2004.

Document type:	Conference Paper
Collection:	Conference Papers

Title	Effects of design geometry on SU8 polymer waveguides
Author(s)	Holland, A Balkunje, V Mitchell, A Austin, M Raghunathan, M Kostovski, G
Year	2005
Conference name	Smart Structures, Devices, and Systems II
Conference location	Sydney, Australia
Conference dates	13 December 2004
Proceedings title	Proceedings of SPIE, Vol. 5649, 186 (2005)
Publisher	SPIE
Place of publication	Sydney, Australia
Abstract	The spin-on photoresist SU8 from MicroChem has a relatively high refractive index (n=1.57 at 1550nm) compared with other polymers. It is stable and has high optical transmission at optical communication wavelengths. In this paper we study rib waveguides fabricated using SU8 as the core layer and thermoset polymers UV15 (n=1.50 at 1550nm) from Master Bond and NOA61 (n=1.54 at 1550nm) from Gentec as the cladding layers. The rib height is varied from 0.3 to 1.7µm high. This is part of the SU8 layer sandwiched between the cladding layers. The waveguides are tested to determine the effects of varying this geometry for single mode optical transmission. The lengths of the waveguides were 1.5 cm to 5 cm.
Subjects	Optical Networks and Systems
Keyword(s)	integrated optics
Copyright notice	© SPIE--The International Society for Optical Engineering

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