Hydrogen sensing by ZnO/SiC based solid state structures

Trinchi, A, Li, Y, Wlodarski, W, Kalantar-Zadeh, K and Cantalini, C 2004, 'Hydrogen sensing by ZnO/SiC based solid state structures', in Proceedings of the 8th Italian Conference on Sensors and Microsystems, Trento, Italy, 12-14 February 2003.


Document type: Conference Paper
Collection: Conference Papers

Title Hydrogen sensing by ZnO/SiC based solid state structures
Author(s) Trinchi, A
Li, Y
Wlodarski, W
Kalantar-Zadeh, K
Cantalini, C
Year 2004
Conference name Italian Conference on Sensors and Microsystems
Conference location Trento, Italy
Conference dates 12-14 February 2003
Proceedings title Proceedings of the 8th Italian Conference on Sensors and Microsystems
Publisher World Scientific
Place of publication Singapore
Abstract The hydrogen gas sensing performance of Pt/ZnO/SiC solid-state structures has been investigated. The ZnO thin films were deposited by a planar r.f. magnetron sputterer onto n-type 6H silicon carbide wafers. These devices were employed as Schottky diodes and operated in constant current mode. Exposure to different concentrations of hydrogen gas results in changes in the device's carrier concentration and hence in the Schottky barrier height. This results in a change in the forward bias voltage. The ZnO thin films, after annealing in static air at 300, 500, 700 and 900°C, have been characterized by X-ray Photoelectron Spectroscopy (XPS) and X-Ray Diffraction (XRD). The formation of hexagonal ZnO ICSD card. N° 29272 was observed when the films were annealed at temperatures greater than 500°C. The sensors responses to hydrogen were analyzed when the ambient gas was 5% oxygen balanced in nitrogen. These responses were stable and repeatable in the investigated temperature range of 300 and 500°C.
Subjects Sensor Technology (Chemical aspects)
DOI - identifier 10.1142/9789812702944_0031
Copyright notice © 2004 by World Scientific Publishing Co. Pte. Ltd.
Versions
Version Filter Type
Altmetric details:
Access Statistics: 208 Abstract Views  -  Detailed Statistics
Created: Wed, 25 Nov 2009, 08:00:32 EST by Catalyst Administrator
© 2014 RMIT Research Repository • Powered by Fez SoftwareContact us