Hydrogen and ozone SAW based gas sensors with RF magnetron sputtered InOx and electron beam evaporated SiNx

Fechete, A, Wisitsoraat, A, Wlodarski, W, Kalantar-Zadeh, K, Kandasamy, S and Holland, A 2006, 'Hydrogen and ozone SAW based gas sensors with RF magnetron sputtered InOx and electron beam evaporated SiNx', Journal of Rare Metal Materials and Engineering, vol. 35, no. 1, pp. 206-209.


Document type: Journal Article
Collection: Journal Articles

Title Hydrogen and ozone SAW based gas sensors with RF magnetron sputtered InOx and electron beam evaporated SiNx
Author(s) Fechete, A
Wisitsoraat, A
Wlodarski, W
Kalantar-Zadeh, K
Kandasamy, S
Holland, A
Year 2006
Journal name Journal of Rare Metal Materials and Engineering
Volume number 35
Issue number 1
Start page 206
End page 209
Total pages 3
Publisher Science Press
Abstract Abstract not available
Subject Sensor Technology (Chemical aspects)
Copyright notice © 2006 Northwest Institute for Nonferrous Metal Research (China)
ISSN 1002-185x
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