Dynamic pull-in instability of a micro-actuator made from nonlinear elasticity materials

Peng, J, Yang, L and Yang, J 2014, 'Dynamic pull-in instability of a micro-actuator made from nonlinear elasticity materials', Smart Materials and Structures, vol. 23, no. 6, 065023, pp. 1-8.


Document type: Journal Article
Collection: Journal Articles

Title Dynamic pull-in instability of a micro-actuator made from nonlinear elasticity materials
Author(s) Peng, J
Yang, L
Yang, J
Year 2014
Journal name Smart Materials and Structures
Volume number 23
Issue number 6
Article Number 065023
Start page 1
End page 8
Total pages 8
Publisher Institute of Physics Publishing Ltd.
Abstract This paper investigates the dynamic pull-in instability of a micro-actuator made from nonlinear elasticity materials. The theoretical formulations are based on Bernoulli-Euler beam theory and include the effects of both material nonlinearity and mid-plane stretching due to large deformation. By employing the Galerkin method, the nonlinear partial differential governing equation is decoupled into a set of nonlinear ordinary differential equations which are then solved using the Runge-Kutta method. Numerical results show that the linear constitutive relationship used in previous studies is valid for small deformation only, whereas for large deformation the nonlinear elasticity constitutive relationship must be used for accurate analysis. The effects of material nonlinearity, initial gap, beam length, and beam width on the pull-in instability of the micro-actuator are studied.
Subject Solid Mechanics
Microelectromechanical Systems (MEMS)
Keyword(s) micro-actuator
material nonlinearity
dynamic pull-in instability
DOI - identifier 10.1088/0964-1726/23/6/065023
Copyright notice © 2014 IOP Publishing Ltd
ISSN 0964-1726
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Citation counts: TR Web of Science Citation Count  Cited 8 times in Thomson Reuters Web of Science Article | Citations
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