Excimer laser surface micromachining of LiNbO3 for realisation of optimised optical modulator electrode structures

Chong, H, Mitchell, A, Hayes, J and Austin, M 2001, 'Excimer laser surface micromachining of LiNbO3 for realisation of optimised optical modulator electrode structures', in Proceedings of SPIE 4557, Micromachining and Microfabrication Process Technology VII, San Francisco, USA, 22 October 2001.


Document type: Conference Paper
Collection: Conference Papers

Title Excimer laser surface micromachining of LiNbO3 for realisation of optimised optical modulator electrode structures
Author(s) Chong, H
Mitchell, A
Hayes, J
Austin, M
Year 2001
Conference name Micromachining and Microfabrication Process Technology
Conference location San Francisco, USA
Conference dates 22 October 2001
Proceedings title Proceedings of SPIE 4557, Micromachining and Microfabrication Process Technology VII
Publisher SPIE
Place of publication Bellingham, USA
Abstract An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF (krypton fluoride) excimer laser photoablation is presented. High resolution trenches, 2-20 micrometers wide and 0.5-7.5 micrometers depth have been produced. These trenches are assessed and are deemed suitable for the machining of integrated optic structures with particular application in the enhancement of electrodes for broadband optical intensity modulators.
Subjects Manufacturing Processes and Technologies (excl. Textiles)
Keyword(s) integrated optics
DOI - identifier 10.1117/12.442934
Copyright notice © 2003 SPIE
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