Structural and microwave characterisation of magnetron sputtered Ba0.5 Sr0.5 TiO3 films on {c}-plane sapphire substrates

Fardin, E, Holland, A, Ghorbani, K and Usher, B 2006, 'Structural and microwave characterisation of magnetron sputtered Ba0.5 Sr0.5 TiO3 films on {c}-plane sapphire substrates', in Current and Future Trends of Functional Oxide Films - MRS Proceedings Volume 928E, San Francisco, USA, 17-21 April 2006.


Document type: Conference Paper
Collection: Conference Papers

Title Structural and microwave characterisation of magnetron sputtered Ba0.5 Sr0.5 TiO3 films on {c}-plane sapphire substrates
Author(s) Fardin, E
Holland, A
Ghorbani, K
Usher, B
Year 2006
Conference name Materials Research Society Symposium
Conference location San Francisco, USA
Conference dates 17-21 April 2006
Proceedings title Current and Future Trends of Functional Oxide Films - MRS Proceedings Volume 928E
Publisher Materials Research Society
Place of publication Red Hook, USA
Abstract Many studies of Barium Strontium Titanate (BST) thin films for RF / microwave applications have employed MgO, LaAlO,3 or Pt/Si as the substrate material for BST deposition. However, there have been relatively few reports of BST films grown on sapphire, despite the excellent microwave properties of this material. In this investigation, BST thin films were deposited by RF magnetron sputtering on (001) single crystal c-plane sapphire substrates. Interdigitated capacitors (IDCs) patterned on the film surface were used to measure the dielectric tunability and loss tangent at microwave frequencies. Thick Au conductors were electroplated to minimize conductor losses. Post deposition annealing in air was found to significantly improve the tunability of the sputtered films.
Copyright notice © 2006 Materials Research Society
ISBN 9781558998858
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