Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [invited]

Allioux, D, Belarouci, A, Hudson, D, Magi, E, Sinobad, M, Beaudin, G, Michon, A, Singh, N, Orobtchouk, R and Grillet, C 2018, 'Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [invited]', Photonics Research, vol. 6, no. 5, pp. 74-81.


Document type: Journal Article
Collection: Journal Articles

Title Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [invited]
Author(s) Allioux, D
Belarouci, A
Hudson, D
Magi, E
Sinobad, M
Beaudin, G
Michon, A
Singh, N
Orobtchouk, R
Grillet, C
Year 2018
Journal name Photonics Research
Volume number 6
Issue number 5
Start page 74
End page 81
Total pages 8
Publisher Optical Society of America
Abstract We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near-to mid-infrared. We probe 10 ?m diameter disks with different under-etching depths, from 4 ?m down to 1.4 ?m, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.
Subject Nonlinear Optics and Spectroscopy
Nanophotonics
DOI - identifier 10.1364/PRJ.6.000B74
Copyright notice Journal © 2018 Chinese Laser Press
ISSN 2327-9125
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