Focussed electron beam induced deposition of platinum plasmonic antennae

Heffernan, A, Stavrevski, D, Maksymov, I, Kostecki, R, Ebendorff-Heidepriem, H, Greentree, A and Gibson, B 2018, 'Focussed electron beam induced deposition of platinum plasmonic antennae', in Georg von Freymann, Winston V. Schoenfeld, Raymond C. Rumpf (ed.) Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, Proc. of SPIE Vol. 10544, San Francisco, California, United States, 22 February 2018, pp. 1-7.


Document type: Conference Paper
Collection: Conference Papers

Title Focussed electron beam induced deposition of platinum plasmonic antennae
Author(s) Heffernan, A
Stavrevski, D
Maksymov, I
Kostecki, R
Ebendorff-Heidepriem, H
Greentree, A
Gibson, B
Year 2018
Conference name SPIE OPTO, 2018
Conference location San Francisco, California, United States
Conference dates 22 February 2018
Proceedings title Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, Proc. of SPIE Vol. 10544
Editor(s) Georg von Freymann, Winston V. Schoenfeld, Raymond C. Rumpf
Publisher Society of Photo-Optical Instrumentation Engineers (SPIE)
Place of publication San Francisco, United States
Start page 1
End page 7
Total pages 7
Abstract The direct write of photonic elements onto substrates presents opportunities for rapid prototyping and novel sensing architectures in domains inaccessible to traditional lithography. In particular, focussed electron beam induced deposition (FEBID) of platinum is a convenient technology for such direct-write applications with the advantage of relatively controlled deposition parameters and sub-10 nm resolution. One issue for FEBID of platinum is that the precursor gas contains a relatively high carbon content, which in turn leads to carbonaceous deposits in the final structure. Here we explore the creation of plasmonic nanoantennae using FEBID platinum. We compare as-deposited and annealed antenna with heights of 40 nm and 56 nm, showing the effect of annealing on the carbon concentration and hence the optical properties. These results are compared with modelling using Mie scattering theory. Our results show that FEBID platinum is a useful material for the direct-write of plasmonic nanoantenna.
Subjects Photonics, Optoelectronics and Optical Communications
DOI - identifier 10.1117/12.2289380
Copyright notice © 2018 SPIE
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