Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching

Barlow, A, Sano, N, Murdoch, B, Portoles, J, Pigram, P and Cumpson, P 2018, 'Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching', Applied Surface Science, vol. 459, pp. 678-685.


Document type: Journal Article
Collection: Journal Articles

Title Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching
Author(s) Barlow, A
Sano, N
Murdoch, B
Portoles, J
Pigram, P
Cumpson, P
Year 2018
Journal name Applied Surface Science
Volume number 459
Start page 678
End page 685
Total pages 8
Publisher Elsevier BV * North-Holland
Abstract Indium phosphide (InP) surfaces develop a pronounced nanostructured texture upon irradiation by energetic ion beams. We have observed the mechanism of nanostructure evolution of InP under irradiation by an Ar gas cluster ion beam (GCIB) using helium ion microscopy (HIM). Initially, metallic indium nanoparticles form on the surface after removal of the top-most oxide layer. These nanoparticles form a mask which shadows the underlying InP. As the ion dose is increased, the masking effect results in substantial nanostructured topography in the form of pillars or nanocones, oriented along the axis of the incident GCIB. The surface sensitivity and high resolution of the HIM facilitates the direct observation of the metallic indium cap at the top of the pillars.
Subject Surfaces and Structural Properties of Condensed Matter
Keyword(s) Gas cluster ion beam
Helium ion microscopy
Indium phosphide
Nanostructure
SAN
XPS
DOI - identifier 10.1016/j.apsusc.2018.07.195
Copyright notice © 2018 Elsevier B.V. All rights reserved.
ISSN 0169-4332
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