Deposition method and performance of SiO2 as a dielectric material for beam steering electrowetting devices

Khan, I, Castelletto, S and Rosengarten, G 2018, 'Deposition method and performance of SiO2 as a dielectric material for beam steering electrowetting devices', Materials Research Express, vol. 5, no. 7, pp. 1-8.


Document type: Journal Article
Collection: Journal Articles

Title Deposition method and performance of SiO2 as a dielectric material for beam steering electrowetting devices
Author(s) Khan, I
Castelletto, S
Rosengarten, G
Year 2018
Journal name Materials Research Express
Volume number 5
Issue number 7
Start page 1
End page 8
Total pages 8
Publisher Institute of Physics Publishing Ltd.
Abstract Electrowetting has the potential to be applied to steering and concentrating sunlight using liquid lenses. However, the performance of electrowetting devices depends on the careful selection/ fabrication of their constituent dielectric material. The dielectric material should have high optical transparency, chemical stability, high relative permittivity, be relatively thin and have a high breakdown voltage. Recent studies noted that inorganic dielectric materials such as SiO2 are more suitable for beam steering compared to organic dielectric materials such as fluoropolymers or parylene C for example. When optical transmission is not required, electrowetting devices are fabricated by thermally growing SiO2 on top of silicon wafers. However, this deposition method is not suitable for beam steering electrowetting devices as the silicon substrate is not optically transparent. In this paper, we investigated the performance of SiO2 as a dielectric material for beam steering electrowetting devices. Specifically, we measured the contact angle modulation capability of SiO2 produced by electron-beam and sputtering deposition methods and correlated the results with morphological defects of the SiO2 layer introduced by the deposition methods. We investigated the effect of annealing and the performance with ionic and DI water. Finally, we compared the performance of SiO2 with other dielectric materials such as PDMS and Ta2O5 in air/water and silicone oil/water medium.
Subject Materials Engineering not elsewhere classified
Keyword(s) Beam steering electrowetting
Deposition method
SiO2 as dielectric
DOI - identifier 10.1088/2053-1591/aad010
Copyright notice © 2018 IOP Publishing Ltd
ISSN 2053-1591
Versions
Version Filter Type
Citation counts: TR Web of Science Citation Count  Cited 0 times in Thomson Reuters Web of Science Article
Scopus Citation Count Cited 0 times in Scopus Article
Altmetric details:
Access Statistics: 18 Abstract Views  -  Detailed Statistics
Created: Tue, 26 Mar 2019, 09:36:00 EST by Catalyst Administrator
© 2014 RMIT Research Repository • Powered by Fez SoftwareContact us