Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology

Lin, L, Ma, M, Zhang, F, Liu, F, Liu, Z and Li, Y 2018, 'Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology', Ceramics International, vol. 44, pp. 129-132.


Document type: Journal Article
Collection: Journal Articles

Title Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology
Author(s) Lin, L
Ma, M
Zhang, F
Liu, F
Liu, Z
Li, Y
Year 2018
Journal name Ceramics International
Volume number 44
Start page 129
End page 132
Total pages 4
Publisher Pergamon Press
Abstract This paper presents a kind of passive wireless pressure and temperature integrated inductor-capacitor (LC) resonant sensor based on low temperature co-fired ceramic (LTCC) technology. The pressure sensing part is dependent on a traditional cavity capacitor. The temperature sensing part is composed of an interdigital capacitor and a planar spiral inductor. The capacitance and the resistance of inductor coil would change as a response to temperature. The LTCC material with a low Young's modulus of ~65 GPa prepared by our laboratory was used to obtain high pressure sensitivity. The experimental results showed that the prepared sensor has a pressure sensitivity of 1.16 kHz/kPa, and a temperature sensitivity of 0.062% dB/°C within the range of 140850 kPa, 50500 °C, respectively.
Subject Sensor Technology (Chemical aspects)
Keyword(s) Integrated multi-parameter sensor
LTCC
Pressure
Temperature
Wireless sensor
DOI - identifier 10.1016/j.ceramint.2018.08.159
Copyright notice © 2018 Elsevier Ltd and Techna Group S.r.l.
ISSN 0272-8842
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