Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications

Chen, G, Liu, Z, Ma, M, Zhang, F, Li, Y, Wen, Z and Wu, X 2018, 'Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications', Ceramics International, vol. 44, pp. 141-144.


Document type: Journal Article
Collection: Journal Articles

Title Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications
Author(s) Chen, G
Liu, Z
Ma, M
Zhang, F
Li, Y
Wen, Z
Wu, X
Year 2018
Journal name Ceramics International
Volume number 44
Start page 141
End page 144
Total pages 4
Publisher Pergamon Press
Abstract Composites of Li-Al-B-Si-O (LABS) glass and β-Al 2 O 3 have been synthesized for low-temperature co-fired ceramics (LTCC) technology application. The main phase of sintered composites is Li 2 Al 2 Si 3 O 10 and β-Al 2 O 3 phase appears only when its content is higher than 35 wt%. The DC conductivities of sintered composites are all above 1 × 10 −8 S/cm at the temperature of 473 K. The activation energies of alkali ions of different composites are all between the conductivity measured perpendicular and parallel to the c-axis of Eucryptite, which proves the ionic conductance of composites is associated with the main phase of Li 2 Al 2 Si 3 O 10. The CTE of the composites increased with the increase of β-Al 2 O 3 . The CTE of 68 wt% LABS glass-32 wt% β-Al 2 O 3 is 3.15 ppm/°C (25300 °C), which matches that of silicon (3.2 ppm/°C, 25300 °C) well. The results indicate that the composites of Li-Al-B-Si-O glass and β-Al 2 O 3 can be a promising material for LTCC-silicon heterogeneous integration with anodic bonding technology. © 2018 Elsevier Ltd and Techna Group S.r.l.
Subject Nanoelectronics
Functional Materials
Physical Chemistry of Materials
Keyword(s) LABS glass
β-Al2O3
LTCC
Heterogeneous integration
Anodic bonding
DOI - identifier 10.1016/j.ceramint.2018.08.130
Copyright notice © 2018 Elsevier Ltd and Techna Group S.r.l.
ISSN 0272-8842
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