Gas sensing properties of thermally evaporated lamellar MoO3

Rahmani, M, Keshmiri, S, Yu, J, Sadek, A, Al-Mashat, L, Moafi, A, Latham, K, LI, Y, Wlodarski, W and Kalantar-Zadeh, K 2010, 'Gas sensing properties of thermally evaporated lamellar MoO3', Sensors And Actuators B: Chemical, vol. 145, no. 1, pp. 13-19.


Document type: Journal Article
Collection: Journal Articles

Title Gas sensing properties of thermally evaporated lamellar MoO3
Author(s) Rahmani, M
Keshmiri, S
Yu, J
Sadek, A
Al-Mashat, L
Moafi, A
Latham, K
LI, Y
Wlodarski, W
Kalantar-Zadeh, K
Year 2010
Journal name Sensors And Actuators B: Chemical
Volume number 145
Issue number 1
Start page 13
End page 19
Total pages 7
Publisher Elsevier S.A.
Abstract In this work, MoO3 was thermally evaporated onto gold interdigital fingers on quartz substrates and characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM), and transmission electron microscopy (TEM) techniques. The deposited MoO3 consist of stratified long rectangles (average length of 50 μm width of 5 μm and thickness of 500 nm) which are predominantly orthorhombic (alpha-MoO3). Each of these plates was composed of many nano-thick layers (average ~30 nm) placed by Van der Waals forces on top of each other forming lamellar patterns. The devices were used as sensors and exhibited considerable change in surface conductivity when exposed to NO2 and H2 gases at elevated temperature of 225 ºC. The structural and gas sensing properties of thermally evaporated MoO3 thin films were investigated.
Keyword(s) gas sensors
molybdenum oxide
thermal evaporation
DOI - identifier 10.1016/j.snb.2009.11.007
Copyright notice © 2009 Elsevier B.V. All rights reserved
ISSN 0925-4005
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