The electronic structure of tungsten oxide thin films prepared by pulsed cathodic arc deposition and plasma-assisted pulsed magnetron sputtering

Field, M, McCulloch, D, Lim, S, Anders, A, Keast, V and Burgess, R 2008, 'The electronic structure of tungsten oxide thin films prepared by pulsed cathodic arc deposition and plasma-assisted pulsed magnetron sputtering', Journal of Physics: Condensed Matter, vol. 20, no. 17, pp. 175216-175216.


Document type: Journal Article
Collection: Journal Articles

Title The electronic structure of tungsten oxide thin films prepared by pulsed cathodic arc deposition and plasma-assisted pulsed magnetron sputtering
Author(s) Field, M
McCulloch, D
Lim, S
Anders, A
Keast, V
Burgess, R
Year 2008
Journal name Journal of Physics: Condensed Matter
Volume number 20
Issue number 17
Start page 175216
End page 175216
Total pages 7
Publisher Institute of Physics Publishing
Abstract Pulsed cathodic arc and pulsed magnetron sputtered WO3 thin films were investigated using electron microscopy. It was found that the cathodic arc deposited material consisted of the a-WO3 phase with a high degree of crystallinity. In contrast, the magnetron sputtered material was highly disordered making it difficult to determine its phase. Electron energy-loss spectroscopy was used to study the oxygen K edge of the films and it was found that the near-edge fine structures of films produced by the two deposition methods differed. The oxygen K-edge near-edge structures for various phases of WO3 were calculated using two different self-consistent methods. Each phase was found to exhibit a unique oxygen K edge, which would allow different phases of WO3 to be identified using x-ray absorption spectroscopy or electron energy-loss spectroscopy. Both calculation methods predicted an oxygen K edge for the (alpha)-WO3 phase which compared well to previous x-ray absorption spectra. In addition, a close match was found between the oxygen K edges obtained experimentally from the cathodic arc deposited material and that calculated for the a-WO 3 phase.
Subject Surfaces and Structural Properties of Condensed Matter
DOI - identifier 10.1088/0953-8984/20/17/175216
ISSN 0953-8984
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