Improved cantilever profiles for sensor elements

Fernando, S, Austin, M and Chaffey, J 2007, 'Improved cantilever profiles for sensor elements', Journal of Physics D: Applied Physics, vol. 40, pp. 7652-7655.


Document type: Journal Article
Collection: Journal Articles

Title Improved cantilever profiles for sensor elements
Author(s) Fernando, S
Austin, M
Chaffey, J
Year 2007
Journal name Journal of Physics D: Applied Physics
Volume number 40
Start page 7652
End page 7655
Total pages 4
Publisher IOP Publishing
Abstract The problem of simultaneously enhancing sensitivity and noise immunity of microcantilevers is investigated. The dependence of deflection and resonant frequency of a microcantilever on its dimensions is studied. A principle to increase deflection and resonant frequency simultaneously is established. Several cantilevers agreeing with this principle are investigated using analytical models and are compared with FEM simulations. Using these results, a cantilever profile that achieves a larger deflection and a larger resonant frequency compared with uniform cantilevers is proposed to be used in sensor elements.
Subject Electrical and Electronic Engineering not elsewhere classified
Keyword(s) computer simulation
finite element method
mathematical models
natural frequencies
problem solving
cantilever profiles
microcantilevers
noise immunity
sensor elements
sensors
DOI - identifier 10.1088/0022-3727/40/24/009
Copyright notice © 2007 IOP Publishing Ltd.
ISSN 0022-3727
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