Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS

Mutzenich, S, Vinay, T, Sood, D and Rosengarten, G 2006, 'Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS', Sensors and Actuators A: Physical, vol. 127, no. 1, pp. 147-154.


Document type: Journal Article
Collection: Journal Articles

Title Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS
Author(s) Mutzenich, S
Vinay, T
Sood, D
Rosengarten, G
Year 2006
Journal name Sensors and Actuators A: Physical
Volume number 127
Issue number 1
Start page 147
End page 154
Total pages 7
Publisher Elsevier S.A
Abstract Hydrostatic actuation is a novel micro hydraulic actuation principle that uses temperature-induced pressure changes in a contained fluid as the driving force. The mechanism for actuation is unique in MEMS and the mechanical/structural design has not yet been fully characterised. In this paper, characterisation was carried out by assessing analytical models from earlier researchers created in an attempt to describe the mechanics of Bourdon tubes. Finite element models were produced as a more accurate means of analysis due to the inherent complexities and geometric nonlinearities of hydrostatic actuation. To validate the analytical and finite element models, macro prototypes were developed and tested as a means of comparison of the mechanics of the proposed hydrostatic actuation.
Subject Numerical Analysis
Keyword(s) hydrostatic actuation
characterisation
microactuators
finite element analysis
microgripper
actuators
DOI - identifier 10.1016/j.sna.2005.11.002
Copyright notice Copyright © 2005 Elsevier B.V.
ISSN 0924-4247
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