A piezoelectric ultrasonic linear micromotor using a slotted stator

Yun, C, Watson, B, Friend, J and Yeo, L 2010, 'A piezoelectric ultrasonic linear micromotor using a slotted stator', IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 57, no. 8, pp. 1868-1874.


Document type: Journal Article
Collection: Journal Articles

Title A piezoelectric ultrasonic linear micromotor using a slotted stator
Author(s) Yun, C
Watson, B
Friend, J
Yeo, L
Year 2010
Journal name IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume number 57
Issue number 8
Start page 1868
End page 1874
Total pages 7
Publisher IEEE
Abstract A novel ultrasonic micro linear motor that uses 1st longitudinal and 2nd bending modes, derived from a bar-type stator with a rectangular slot cut through the stator length, has been proposed and designed for end-effect devices of microrobotics and bio-medical applications. The slot structure plays an important role in the motor design, and can be used not only to tune the resonance frequency of the two vibration modes but also to reduce the undesirable longitudinal coupling displacement caused by bending vibration at the end of the stator. By using finite element analysis, the optimal slot dimension to improve the driving tip motion was determined, resulting in the improvement of the motor performance. The trial linear motor, with a weight of 1.6 g, gave a maximum driving velocity of 1.12 m/s and a maximum driving force of 3.4 N. A maximum mechanical output power of 1.1 W was obtained at force of 1.63 N and velocity of 0.68 m/s. The output mechanical power per unit weight was 688 W /kg
Subject Acoustics and Acoustical Devices; Waves
Dynamics, Vibration and Vibration Control
Microelectromechanical Systems (MEMS)
DOI - identifier 10.1109/TUFFC.2010.1626
Copyright notice © 2010 IEEE
ISSN 0885-3010
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