A non-contact linear bearing and actuator via ultrasonic levitation

Ide, T, Friend, J, Nakamura, K and Ueha, S 2007, 'A non-contact linear bearing and actuator via ultrasonic levitation', Sensors and Actuators A: Physical, vol. 135, no. 2, pp. 740-747.


Document type: Journal Article
Collection: Journal Articles

Title A non-contact linear bearing and actuator via ultrasonic levitation
Author(s) Ide, T
Friend, J
Nakamura, K
Ueha, S
Year 2007
Journal name Sensors and Actuators A: Physical
Volume number 135
Issue number 2
Start page 740
End page 747
Total pages 8
Publisher Elsevier S.A.
Abstract In this study, the design and testing of a linear bearing using near-field acoustic levitation (NFAL) phenomenon was performed. A pair of Langevin transducers placed at either end of a beam with either a right-angle V-shaped or ^-shaped cross-section was used to excite and absorb ultrasonic flexural vibrations transmitted along the length of the beam from one transducer to the other. The beam was used as a guide rail, supporting a slider formed from a short length of beam with the same cross-section. This arrangement provides a small and inexpensive non-contact bearing with magnetic field immunity and without generating a magnetic field, both useful characteristics for clean room and precision actuators. The slider was levitated by the vibration of the beam up to 100 µm, and was moved successfully in either direction by traveling waves transmitted along the guide rail. In a 300-mm long prototype, objects up to 160 g (60.5 kg/m2) were levitated and transported. A transportation speed of 138 mm/s was obtained for a slider of 90 g. The stiffness of the levitation was found to be 1.1 N/µm/m2 for this prototype.
Subject Acoustics and Acoustical Devices; Waves
Microelectromechanical Systems (MEMS)
Fluid Physics
Keyword(s) acoustic levitation
linear actuator
piezoelectric actuator
clean room
non-contact actuator
DOI - identifier 10.1016/j.sna.2006.08.005
Copyright notice © 2006 Elsevier B.V. All rights reserved.
ISSN 0924-4247
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