UV laser ablation of PLZT and PSZT films

Leech, P, Holland, A, Sriram, S and Bhaskaran, M 2008, 'UV laser ablation of PLZT and PSZT films', in Passive and Electromechanical Materials and Integration. Materials Research Society Symposium Proceedings. Vol. 1075E, San Francisco, CA, USA, 24-28 March 2008.


Document type: Conference Paper
Collection: Conference Papers

Title UV laser ablation of PLZT and PSZT films
Author(s) Leech, P
Holland, A
Sriram, S
Bhaskaran, M
Year 2008
Conference name Materials Research Society Symposium Proceedings Spring 2008
Conference location San Francisco, CA, USA
Conference dates 24-28 March 2008
Proceedings title Passive and Electromechanical Materials and Integration. Materials Research Society Symposium Proceedings. Vol. 1075E
Publisher Materials Research Society
Place of publication United States
Abstract The ablation of strontium-doped lead zirconate titanate (PSZT) and lanthanum-doped lead zirconate titanate (PLZT) films has been examined using a 5 ns pulsed excimer laser. Individual squares were patterned with sides in the range of 10-30 µm using single and multiple pulses. The depth of ablation in PLZT films was higher at all fluences than in PSZT films. The morphology of the etched surfaces has comprised the formation of globules which had diameters of 200-250 nm in PLZT and 1400-1600 nm in PSZT films. The diameter of the globules has been shown to increase with fluence until reaching an approximately constant size at >20 J/cm2 in both types of film. The composition of the films following ablation has been analyzed using x-ray photoelectron spectroscopy (XPS) and energy dispersive x-ray (EDX) spectroscopy.
Subjects Materials Engineering not elsewhere classified
Keyword(s) functional materials and microsystems
Copyright notice © 2006 Materials Research Society
Versions
Version Filter Type
Citation counts: Scopus Citation Count Cited 0 times in Scopus Article
Access Statistics: 470 Abstract Views  -  Detailed Statistics
Created: Tue, 01 Sep 2009, 08:28:58 EST by Catalyst Administrator
© 2014 RMIT Research Repository • Powered by Fez SoftwareContact us