A novel Love-mode device based on ZnO/ST-cut quartz crystal structure for sensing applications

Kalantar-Zadeh, K, Trinchi, A, Wlodarski, W and Holland, A 2002, 'A novel Love-mode device based on ZnO/ST-cut quartz crystal structure for sensing applications', Sensors and Actuators A: Physical: An International Journal Devoted to Research and Development of Physical and Chemical Transducers, vol. 100, pp. 135-143.


Document type: Journal Article
Collection: Journal Articles

Title A novel Love-mode device based on ZnO/ST-cut quartz crystal structure for sensing applications
Author(s) Kalantar-Zadeh, K
Trinchi, A
Wlodarski, W
Holland, A
Year 2002
Journal name Sensors and Actuators A: Physical: An International Journal Devoted to Research and Development of Physical and Chemical Transducers
Volume number 100
Start page 135
End page 143
Total pages 8
Publisher Elsevier S.A.
Abstract A novel Love-mode surface acoustic wave (SAW) sensor with ZnO guiding layer and 90degrees rotated ST-cut quartz crystal substrate will be presented. Analysis of this device with different thicknesses of ZnO films was undertaken. It will be shown that this novel structure offers distinct advantages over previously fabricated Love-mode structures. These advantages include significantly high sensitivity, small temperature coefficient of frequency and high electromechanical coupling coefficient.
Subject Colloid and Surface Chemistry
Solid State Chemistry
Keyword(s) ZnO
ST-cut quartz crystal
Love-wave
SAW
DOI - identifier 10.1016/S0924-4247(02)00038-9
Copyright notice © 2002 Elsevier Science
ISSN 0924-4247
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