A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen gas sensing

Ippolito, S, Kalantar-Zadeh, K, Trinchi, A and Wlodarski, W 2003, 'A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen gas sensing', Sensor Letters, vol. 1, no. 1, pp. 33-36.


Document type: Journal Article
Collection: Journal Articles

Title A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen gas sensing
Author(s) Ippolito, S
Kalantar-Zadeh, K
Trinchi, A
Wlodarski, W
Year 2003
Journal name Sensor Letters
Volume number 1
Issue number 1
Start page 33
End page 36
Total pages 3
Publisher American Scientific Publishers
Abstract A layered surface acoustic wave (SAW) gas sensor is investigated for hydrogen concentrations of 0.5% and 1% in air at different operational temperatures. The device structure is based on a layered SAW device fabricated on a 36° X-cut, Y-propagating LiTaO3 substrate. A ZnO guiding layer is employed to increase sensor sensitivity, and a thin film of WO3 provides the selectivity toward hydrogen gas. Such a structure has the advantage of confining the acoustic wave energy at the surface of the device, which increases the sensitivity of the device. In this paper, the fabrication of the ZnO/36° YXLiTaO3 sensor is described, and the sensor's response features are analyzed in terms of response time, recovery time, and response magnitude as a function of operational temperature. Furthermore, the hydrogen interaction with the WO3 selective layer is briefly described.
Subject Colloid and Surface Chemistry
DOI - identifier 10.1166/sl.2003.007
Copyright notice © 2003 American Scientific Publishers
ISSN 1546-198x
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