Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications

Prokop, C, Schoenhardt, S, Mahmud, T, Mitchell, A and Karnutsch, C 2016, 'Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications', Journal of Micromechanics and Microengineering, vol. 26, no. 5, 055001, pp. 1-10.


Document type: Journal Article
Collection: Journal Articles

Title Bonding of SU-8 films onto KMPR structures for microfluidic, air-suspended photonic and optofluidic applications
Author(s) Prokop, C
Schoenhardt, S
Mahmud, T
Mitchell, A
Karnutsch, C
Year 2016
Journal name Journal of Micromechanics and Microengineering
Volume number 26
Issue number 5
Article Number 055001
Start page 1
End page 10
Total pages 10
Publisher Institute of Physics Publishing
Abstract We present a method to bond unstructured and structured SU-8 films down to sub-micron thicknesses onto microchannels fabricated in KMPR using a flexible polydimethylsiloxane (PDMS) stamp. By exploiting differently casted PDMS stamps, 3D microfluidic channel networks, air-suspended photonic devices and optofluidic structures have been fabricated. First, microchannels of KMPR are patterned by photolithography and an SU-8 film is spin coated onto a prepared PDMS stamp. The stamp is then placed on top of the KMPR microchannels and the SU-8 layer is cross-linked by applying sufficient heat and pressure. After peeling off the PDMS stamp, the SU-8 layer remains bonded on the KMPR. In our experiments, we demonstrate the bonding of approximately 0.5 μm thick structured SU-8 films onto KMPR microchannels of about 500 μm width and 25 μm height. Bond strength tests demonstrated that such thin layers can withstand pressures up to 1100 hPa. The laminated SU-8 layers can enable various functionalities, e.g. sealing of microfluidic channels, realization of air-suspended photonic structures or optofluidic devices. Most importantly, the combination of fluid handling in the microchannels and air-suspended photonic structures realized in the laminated SU-8 layer enables research towards a large range of applications, such as optofluidics, biosensors, chemical and biomedical analysis, environmental investigations, and renewable energy.
Subject Photonics and Electro-Optical Engineering (excl. Communications)
Microelectronics and Integrated Circuits
Keyword(s) Bonding of SU-8 onto KMPR
Microfabrication
Air-suspended structures
Microfluidics
Photonics
Optofluidics
DOI - identifier 10.1088/0960-1317/26/5/055001
Copyright notice © 2016 IOP Publishing Ltd
ISSN 0960-1317
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