Air-suspended SU-8 polymer waveguide grating couplers

Prokop, C, Schoenhardt, S, Laegel, B, Wolff, S, Mitchell, A and Karnutsch, C 2016, 'Air-suspended SU-8 polymer waveguide grating couplers', Journal of Lightwave Technology, vol. 34, no. 7, pp. 3966-3971.


Document type: Journal Article
Collection: Journal Articles

Title Air-suspended SU-8 polymer waveguide grating couplers
Author(s) Prokop, C
Schoenhardt, S
Laegel, B
Wolff, S
Mitchell, A
Karnutsch, C
Year 2016
Journal name Journal of Lightwave Technology
Volume number 34
Issue number 7
Start page 3966
End page 3971
Total pages 6
Publisher IEEE
Abstract We present SU-8 polymer waveguide grating couplers for TE mode with enhanced refractive index contrast by employing air as upper and lower cladding layer. Numerical simulations predict a coupling loss of 4.9 dB, indicating a coupling efficiency of 32 % at a maximum spectral response of 1550 nm. Based on a polymer lamination method, air-suspended waveguide grating couplers were successfully fabricated and characterized. Due to current limitations in the fabrication process, the perturbation of the experimental grating couplers is weaker than the original simulation. However, transmission measurements have shown that a single grating coupler exhibits approximately 8 dB coupling loss at a center wavelength of 1557 nm, indicating a coupling efficiency of 16 % with respect to a single-mode optical fiber. The demonstrated parallel fabrication method employing the widely used SU-8 photoresist makes the polymer waveguide grating couplers very attractive for a wide range of low-cost polymer photonic applications.
Subject Photonics and Electro-Optical Engineering (excl. Communications)
Microelectronics and Integrated Circuits
Keyword(s) Air-suspended structures
bonding
grating coupler
integrated optics
microfabrication
SU-8
KMPR
DOI - identifier 10.1109/JLT.2016.2593025
Copyright notice © 2016 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
ISSN 0733-8724
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